Ponte Academic Journal May 2014, Volume 70, Issue 5 |
INFLUENCE OF PROCESS PARAMETERS ON STRUCTURE OF TIALN COATING PREPARED BY A SYSTEM WITH ROTARY ARC CATHODES Author(s): Mojm?r J?lek, Ond?ej Zindulka J. Ponte - May 2014 - Volume 70 - Issue 5 Abstract: It is advantageous to have a tool for a coating stoichiometry calculation to control coating deposition made from two different cathodes. Stoichiometry depends not only on arc currents ratio, but also on intensity and shape of magnetic field. This relation has been experimentally verified and is presented for TiAlN coating prepared by a new coating device Pi111. With the aid of this tool, it is possible to estimate coating parameters and to reach the desired Al/Ti ratio in a coating. With increasing content of Al in a coating, cubic structure shifts to hexagonal structure. This change proves itself not only by hardness decrease, but also by a change of coating growth rate. For detailed description of this effect, method of calculation of coating stoichiometry described above was used.
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